JPH0526549Y2 - - Google Patents
Info
- Publication number
- JPH0526549Y2 JPH0526549Y2 JP13098087U JP13098087U JPH0526549Y2 JP H0526549 Y2 JPH0526549 Y2 JP H0526549Y2 JP 13098087 U JP13098087 U JP 13098087U JP 13098087 U JP13098087 U JP 13098087U JP H0526549 Y2 JPH0526549 Y2 JP H0526549Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- tip
- electrons
- top cover
- emitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13098087U JPH0526549Y2 (en]) | 1987-08-28 | 1987-08-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13098087U JPH0526549Y2 (en]) | 1987-08-28 | 1987-08-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6437686U JPS6437686U (en]) | 1989-03-07 |
JPH0526549Y2 true JPH0526549Y2 (en]) | 1993-07-05 |
Family
ID=31386628
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13098087U Expired - Lifetime JPH0526549Y2 (en]) | 1987-08-28 | 1987-08-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0526549Y2 (en]) |
-
1987
- 1987-08-28 JP JP13098087U patent/JPH0526549Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS6437686U (en]) | 1989-03-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6371537U (en]) | ||
GB698850A (en) | Improvements in and relating to apparatus for separating charged particles of different mass-to-charge ratios | |
US6774363B2 (en) | Method of preventing charging, and apparatus for charged particle beam using the same | |
US4855673A (en) | Electron beam apparatus | |
JPH0526549Y2 (en]) | ||
KR20220056408A (ko) | 알파 입자의 펄스 검출을 통한 라돈 측정기 | |
JPH0968473A (ja) | 熱陰極型真空計 | |
JPH0526484Y2 (en]) | ||
JPS6089050A (ja) | ストロボ走査電子顕微鏡 | |
JPH09211137A (ja) | 二重円筒形オープンカウンター | |
JPH0755512Y2 (ja) | ファラデ―カップモニタ | |
JP2676004B2 (ja) | 電離真空計 | |
JPH03141546A (ja) | エレクトロンを測定する装置と方法 | |
JPH0522864Y2 (en]) | ||
JPS6068542A (ja) | イオン注入装置 | |
JPS63102149A (ja) | 定量電位測定用スペクトロメータ検出器装置 | |
JP2554129Y2 (ja) | ビームファインダ付きファラデーカップ装置 | |
JPS5871466A (ja) | イオン電流検出器 | |
JPH0341402Y2 (en]) | ||
JP3345256B2 (ja) | 荷電粒子検出装置 | |
JPS606993Y2 (ja) | X線発生装置 | |
JPH0429478Y2 (en]) | ||
SU989495A1 (ru) | Детектор ионизирующего излучени | |
JPS63142825A (ja) | Ic動作評価補助方法 | |
JPH117914A (ja) | イオン照射装置 |